Technical Articles & Blogs

CS MANTECH 2024 – J. Turcaud et al.Influence of Carbon Capping Materials during High Temperature Annealing on Surface, Defects and Dopant Profile in SiC
MRS Advances (2023) – J. Turcaud et al.Risk of neutron generation with implantation of light ions
CS MANTECH (2023) – J. Turcaud et al.Isolation in Compound Semiconductors and the Risk of Neutron Generation with Implantation of Light Ions
CS MANTECH (2023) – J. Turcaud et al. Ion Implantation Simulation and Optimization in Semiconductor Compounds
IIT (2022) – W. Wriggins et al. Wear and Ion Erosion in Spinning Disk Fences made with Al and Torlon
AIP Conf. Proc. 1066, 152–155 (2008) – R. Johnson et al. Characterization of a Small Form Factor Multipole RGA for Process Chamber Monitoring and for Reduction in Time to Complete Routine Preventive…
AIP Conf. Proc. 1066, 156–158 (2008) – R. Johnson et al.Correlation of Beam Transport Characteristics and Mass Resolving Power to Analyzing Magnet Pole Piece Wear in Axcelis HE Ion Implanters
AIP Conf. Proc. 1066, 198–201 (2008) – R. Johnson et al.Correlation of Measured Surface Contaminants as a Function of Ion Beam Current in GSD Ion Implanters
IIT (2002) – R. Pong et al.Monitoring of ion implanters using multiple dopants
DatasheetIon Implantation Process Engineering  
DatasheetIon Implantation Projected Range Statistics 
IIT 2012 PVD SI coat and eblastAdvanced Process Control and Novel Test Methods for PVD Silicon and Elastomeric Silicone Coatings Utilized on Ion Implant Disks, Heatsinks and Selected Platens
IIT 2018 Paper on Torlon FencesIon Erosion and Elemental Purity of Deposited Si Films on Al
Elastomer Heat Transfer Presentation – IIT14 Michael Current 2014Elastomers for Control of Wafer Temperature in the <50oC Range During High Dose Ion Implantation

Blogs

Ion Implantation Services

November 27, 2024
Ion Implantation for Semiconductor Devices Coherent advanced ion implantation foundry services support semiconductor manufacturers from…
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